Air Products is boosting NF3 capacity

By Tom Stundza -- Purchasing, 12/12/2007 12:38:00 PM

Air Products is increasing global nitrogen trifluoride (NF3) gas capacity with an expansion of the U.S. plant and the opening of a plant in Korea. The Lehigh Valley, Pa.-based firm has increased production capacity at the NF3 production facility in Hometown, Pa., by 200 metric tons to more than 2,200 metric tons/year. In Ulsan, Korea, Air Products will have a new 500 metric ton/year facility open in the first quarter of 2008. Then, capacity at the Ulsan plant will double to 1,000 metric tons/year during the first half of 2009. NF3 is used as a chamber cleaning gas in the manufacture of semiconductors, flat panel displays and other electronic devices. Corning Painter, vice president of electronics for Air Products, says the expansions will bring Air Products’ annual global capacity for NF3 in excess of 3,200 metric tons b y the end of 2009.

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